| Vertical Resolution n | VSI,VEI < 0.5nm, VPI < 0.1nm | Stitching | Yes |
|---|---|---|---|
| Pixel Resolution | 0.03~7.2um (Depends on magnification and camera) | Sample Reflectivity | 0.05~100% |
| Step Height Repeatability | ≤0.1% 1 sigma | Sample Weight | ≤ 20kg |
| Scan Velocity | 8~40um/sec (User 5 selectable) | X/Y Axis Stroke | 600x600mm(Automatic) |
| Scan Method | Piezo @ Closed loop | Z Axis Stroke | 100mm (Automatic) |
| Scan Range | ≤300um (Motor Option ≤10mm) | Joystick | Handwheel Joystick |
| Objective Lens Turret | 6 Lens Available (Automatic Turret) | Work Table Size | 600 x 600mm |
| Zoom Lens Turret | 5 Lens Available (Automatic) | Vibration Isolation | Passive Type (Vertical Resonance : 1.5Hz) |
| Camera | 1/2" Mono Camera (Option : 2/3", 1") | Weight | about 1500kg |
| Illumination | White Light LED | Input Power | 2 ф , 110V/220V (±10%) 15A, 50/60Hz |
| Filter | 3 Filter Available (Automatic) | Software | Surface View / Surface Map @ Window10 64bit |
| Auto Focus | Image Auto Focus (Option :Laser AF) |
*VSI : Visible Sandoz Interferometry *VEI : Visible Envelop Interferometry *VPI : Visible Phase-shift Interferometry
