ELITE

Specification

Vertical Resolution VSI,VEI < 0.5nm, VPI < 0.1nm Stitching Yes
Pixel Resolution 0.03~7.2um (Depends on magnification and camera) Sample Reflectivity 0.05~100%
Step Height Repeatability ≤0.1% 1 sigma Sample Weight ≤ 10kg
Scan Velocity 8~40um/sec (User 5 selectable) X/Y Axis Stroke 100 x 100mm (Automatic)
Scan Method Piezo @ Closed loop Z Axis Stroke 100mm (Automatic)
Scan Range ≤150um (Piezo Option≤300um / Motor Option ≤10mm) Tilt Axis Stroke ±6º (Automatic)
Objective Lens Turret 5 Lens Available (Automatic Turret) Joystick USB Joystick
Zoom Lens Turret 2 Lens Available (Automatic) Work Table Size 230 x 230mm
Camera 1/2" Mono Camera (Option : 2/3", 1") Vibration Isolation Passive Type (Vertical Resonance : 1.5Hz)
Illumination White Light LED Weight about 45kg
Filter 2 Filter Available (Automatic) Input Power 2 ф , 110V/220V (±10%) 15A, 50/60Hz
Auto Focus Image Auto Focus Software Surface View / Surface Map @ Window10 64bit

*VSI : Visible Sandoz Interferometry *VEI : Visible Envelop Interferometry *VPI : Visible Phase-shift Interferometry

목록으로
Contact
Us
Alternate Text