MASTER

Specification

Vertical Resolution n VSI,VEI < 0.5nm, VPI < 0.1nm Stitching Yes
Pixel Resolution 0.03~7.2um (Depends on magnification and camera) Sample Reflectivity 0.05~100%
Step Height Repeatability ≤0.1% 1 sigma Sample Weight ≤ 20kg
Scan Velocity 8~40um/sec (User 5 selectable) X/Y Axis Stroke 600x600mm(Automatic)
Scan Method Piezo @ Closed loop Z Axis Stroke 100mm (Automatic)
Scan Range ≤300um (Motor Option ≤10mm) Joystick Handwheel Joystick
Objective Lens Turret 6 Lens Available (Automatic Turret) Work Table Size 600 x 600mm
Zoom Lens Turret 5 Lens Available (Automatic) Vibration Isolation Passive Type (Vertical Resonance : 1.5Hz)
Camera 1/2" Mono Camera (Option : 2/3", 1") Weight about 1500kg
Illumination White Light LED Input Power 2 ф , 110V/220V (±10%) 15A, 50/60Hz
Filter 3 Filter Available (Automatic) Software Surface View / Surface Map @ Window10 64bit
Auto Focus Image Auto Focus (Option :Laser AF)

*VSI : Visible Sandoz Interferometry *VEI : Visible Envelop Interferometry *VPI : Visible Phase-shift Interferometry

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