| Scan Method | Piezo @ Closed loop | Camera | 1/2" Mono Camera |
|---|---|---|---|
| Scan Range | ≤150um | Illumination | White Light LED |
| Objective Lens Turret | 5 Lens Available (Automatic Turret) | Filter | 2 Filter vailable (Automatic) |
| Zoom Lens | 1.0x |
| Interference Lens | 2.5x, 5.0x, 10x, 20x, 50x, 100x |
|---|---|
| Objective Lens | 2.5x, 5.0x, 10x, 20x, 50x, 100x |
| Zoom Lens | 0.55x, 0.75x, 1.0x, 1.5x, 2.0x |
| Work Table | Porous Vacuum Type Rotatio Table |
| Standard Sample |
Height Standard Lateral Standard Roughness Standard |
*VSI : Visible Sandoz Interferometry *VEI : Visible Envelop Interferometry *VPI : Visible Phase-shift Interferometry
