PROBE

Specification

Scan Method Piezo @ Closed loop Camera 1/2" Mono Camera
Scan Range ≤150um Illumination White Light LED
Objective Lens Turret 5 Lens Available (Automatic Turret) Filter 2 Filter vailable (Automatic)
Zoom Lens 1.0x

Option

Interference Lens 2.5x, 5.0x, 10x, 20x, 50x, 100x
Objective Lens 2.5x, 5.0x, 10x, 20x, 50x, 100x
Zoom Lens 0.55x, 0.75x, 1.0x, 1.5x, 2.0x
Work Table Porous Vacuum Type Rotatio Table
Standard Sample Height Standard
Lateral Standard
Roughness Standard

*VSI : Visible Sandoz Interferometry *VEI : Visible Envelop Interferometry *VPI : Visible Phase-shift Interferometry

Interference Lens
Objective Lens
Zoom Lens
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