| Vertical Resolution | VSI,VEI < 0.5nm, VPI < 0.1nm | Sample Reflectivity | 0.05~100% |
|---|---|---|---|
| Pixel Resolution | 0.03~7.2um (Depends on magnification and camera) | Sample Weight | ≤ 2kg |
| Step Height Repeatability | ≤0.3% 1 sigma | X/Y Axis Stroke | 50 x 50mm (Manual) |
| Scan Velocity | 8~40um/sec (User 5 selectable)) | Z Axis Stroke | 20mm(Manual) |
| Scan Method | Piezo @ Closed loop | Tilt Axis Stroke | ±2º (Manual) |
| Scan Range | ≤100um (Piezo Option≤250um) | Work Table Size | 120 x 120mm |
| Objective Lens | Single Lens | Vibration Isolation | Passive Type (Vertical Resonance : 2.5Hz) |
| Zoom Lens | 1.0x | Weight | about 10kg |
| Camera | 1/2" Mono Camera (Option : 2/3", 1") | Input Power | 2 ф , 110V/220V (±10%) 15A, 50/60Hz |
| Illumination | White Light LED | Software | Surface View / Surface Map @ Window10 64bit |
| Filter | 2 Filter Available (Manual) |
*VSI : Visible Sandoz Interferometry *VEI : Visible Envelop Interferometry *VPI : Visible Phase-shift Interferometry
