Measuring instrument

Specification

Vertical Resolution VSI,VEI < 0.5nm, VPI < 0.1nm Sample Reflectivity 0.05~100%
Pixel Resolution 0.03~7.2um (Depends on magnification and camera) Sample Weight ≤ 2kg
Step Height Repeatability ≤0.3% 1 sigma X/Y Axis Stroke 50 x 50mm (Manual)
Scan Velocity 8~40um/sec (User 5 selectable)) Z Axis Stroke 20mm(Manual)
Scan Method Piezo @ Closed loop Tilt Axis Stroke ±2º (Manual)
Scan Range ≤100um (Piezo Option≤250um) Work Table Size 120 x 120mm
Objective Lens Single Lens Vibration Isolation Passive Type (Vertical Resonance : 2.5Hz)
Zoom Lens 1.0x Weight about 10kg
Camera 1/2" Mono Camera (Option : 2/3", 1") Input Power 2 ф , 110V/220V (±10%) 15A, 50/60Hz
Illumination White Light LED Software Surface View / Surface Map @ Window10 64bit
Filter 2 Filter Available (Manual)

*VSI : Visible Sandoz Interferometry *VEI : Visible Envelop Interferometry *VPI : Visible Phase-shift Interferometry